|
item |
substrate |
| Materials |
Qz合成石英/B27Oi/SL蘇打玻璃
|
| Size |
①3"/4"/5"/6"/7"/9" ② 508*609.6, 620*720, 700*800, 800*960
|
| Thickness |
① >3mm ② >0.8mm
|
| TTV |
① ≤2um ② ≤10um
|
| Flatness |
① >2um ② > 10um
|
| Capability |
100K/M (以126*126為例)
|